Simulation and Mathematical model of MEMS Actuator System with MATLAB

Abstract

This paper presents a comprehensive study on MEMS (Micro-Electro-Mechanical Systems) Actuator Systems, focusing on their simulation, mathematical modeling, and performance evaluation using MATLAB. MEMS actuators play a crucial role in various technological applications, bridging the gap between micro and macro actuators. The research investigates the design and analysis of MEMS Actuator Systems, employing performance charts for both MEMS and macro actuators. Additionally, simulations are carried out using MATLAB to provide insights into the behavior and performance of these systems. The results reveal the efficiency and potential of MEMS Actuator Systems, showcasing their adaptability and precision. This work contributes to a deeper understanding of MEMS technology and its applications, offering valuable insights for future developments in this field.